Wide-band VCOs in SiGe production technology operating up to about 70 GHz

Multipurpose VCOs with wide tuning range and oscillation frequencies up to 74 GHz (on wafer) and 69 GHz (mounted chip, with output buffer), respectively, have been fully integrated in a commercial SiGe production technology. To the best of the authors' knowledge these are record values for commercially available Si-based technologies, despite the moderate transistor f(T) (62 GHz). The oscillation frequency can easily be dropped down to 41.5 GHz by cutting interconnection lines in the upper metallization layer. The phase noise obtained depends on the frequency range chosen and is sufficiently low for the intended applications.