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Advances in pulsed plasma technology (PMS-Process)
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1994
Conference Paper
Title
Advances in pulsed plasma technology (PMS-Process)
Author(s)
Schiller, S.
Goedicke, K.
Reschke, J.
Mainwork
8th International Conference on Vacuum Web Coating
Conference
International Conference on Vacuum Web Coating 1994
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP