Electrical resistance characterization of insulating membrane with multipore

The insulating membranes with micropores are increasingly required for the electrochemical sensing of microfluid around pores with high sensitivity. To characterize the electrical resistance of fabricated insulating membranes with microscaled-multipore by impedance spectroscopy was introduced in this article. The potential distribution and resistance under a weak electric field were investigated with respect to the dimension and configuration of pores by using FEM simulation. The simulation results demonstrated that the equipotential lines around multipore are superposed in dependence of the configuration and dimension of pores, thus the electrical resistance of multipore is determined by the degree of potential superposition around pores.