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  4. Comparison of nano particle implantation with picosecond lasers by concerning different wavelengths from aluminum and copper on silicon wafer substrate
 
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2017
Conference Paper
Title

Comparison of nano particle implantation with picosecond lasers by concerning different wavelengths from aluminum and copper on silicon wafer substrate

Abstract
Copper and Aluminum have similar reactions in Infra-red lasers for nano particle printing and different behavior in frequency doubled lasers. Absorption of two different metals shows various roughness of thin film on silicon wafer substrates.
Author(s)
Azhdast, M.H.
Kossatz, M.
Eichler, H.J.
Lang, K.-D.
Glaw, V.
Mainwork
CLEO: Applications and Technology  
Conference
Conference on Lasers and Electro-Optics - Applications and Technology (CLEO A&T) 2017  
DOI
10.1364/CLEO_AT.2017.ATu4C.2
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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