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A multi-material micropump for applications in microfluidics
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2005
Conference Paper
Title
A multi-material micropump for applications in microfluidics
Author(s)
Richter, M.
Congar, Y.
Nissen, J.
Neumayer, G.
Heinrich, K.
Wackerle, M.
Mainwork
4M2005, First International Conference on Multi-Material Micro Manufacture
Conference
International Conference on Multi-Material Micro Manufacture (4M) 2005
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
