• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Cost reduction strategies for wafer expenditure
 
  • Details
  • Full
Options
2001
Journal Article
Title

Cost reduction strategies for wafer expenditure

Author(s)
Pfitzner, L.
Benesch, N.
Öchsner, R.  
Schmidt, C.
Schneider, C.
Tschaftary, T.
Trunk, R.
Dudenhausen, H.-M.
Journal
Microelectronic engineering  
DOI
10.1016/S0167-9317(00)00504-9
Language
English
IIS-B  
Keyword(s)
  • 300mm wafer

  • integrated metrology

  • AEC/APC

  • wafer reclaim

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024