Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm 2 . The sensor and actuator elements are monolithically fabricated in 150 mm SOI technology. A large optical scan angle of 78.1° at 3.403 kHz and 10 V actuation voltage is achieved. The sensor signal increases linearly to the deflection. A dynamic angle sensitivity of 48.4 fC/° is reached. Possible applications are consumer electronics, such as LIDAR or medical applications, such as fluorescence microscopy.