Systematical concept and statistical evaluation of airborne particle measurements during testing equipment for cleanroom suitability

In the following paper a general examination procedure for cleanroom equipment will be described. The equipment is assigned to different categories which ca be examined following the same procedure. The parameters influencing cleanroom suitability are shown for each category. Measuring procedures are described based on the definition of spaces in which the examinations are to be carried out. The most important part of the measurements are airborne particle counts. In order to be able to give most accurate results the data have to be evaluated statistically. The necessary conditions and procedures are described here.