2008
Conference Paper
Title

MAGIC: A european program to push the insertion of maskless lithography

Author(s)
Pain, L.
Icard, B.
Tedesco, S.
Kampherbeck, B.
Gross, G.
Klein, C.
Loeschner, H.
Platzgummer, E.
Morgan, R.
Manakli, S.
Kretz, J.
Holhe, C.
Choi, K.-H.
Thrum, F.
Kassel, E.
Pilz, W.
Keil, K.
Butschke, J.
Irmscher, M.
Letzkus, F.
Hudek, P.
Paraskevopoulos, A.
Ramm, P.
Weber, J.
Mainwork
Conference
Open Access
DOI
Additional link
Language
English