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A design and production framework for modular microsystems
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1999
Conference Paper
Title
A design and production framework for modular microsystems
Author(s)
Großer, V.
Schünemann, M.
Michel, B.
Reichl, H.
Mainwork
Proceedings of the 1999 International Symposium on Micromechatronics and Human Science
Conference
International Symposium on Micromechatronics and Human Science (MHS) 1999
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
