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Modular solid state technologies for a multi-functional system integration
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2011
Conference Paper
Title
Modular solid state technologies for a multi-functional system integration
Author(s)
Bock, K.
Mainwork
2011 International Conference on Compound Semiconductor Manufacturing Technology. Digest of papers
Conference
International Conference on Compound Semiconductor Manufacturing Technology 2011
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT
