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  4. Minienvironments and Thermal Effects
 
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1999
Conference Paper
Title

Minienvironments and Thermal Effects

Abstract
The paper will provide information obtained from several experiments and their results. From the obstruction of airflows resulting from such items as hotplates, it has been possible to develop a method for designing minienvironment systems required to handle thermal problems.
Author(s)
Schließer, J.
Staudt-Fischbach, P.
Mainwork
10 Years of Advancing the Science of Semiconductor Manufacturing Excellence. ASMC 99 Proceedings  
Conference
Advanced Semiconductor Manufacturing Conference (ASMC) 1999  
Language
English
Fraunhofer-Institut für Produktionstechnik und Automatisierung IPA  
Keyword(s)
  • contamination control

  • minienvironment

  • thermal effect

  • Substrate Cleanroom

  • Reinraum

  • Kontamination

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