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Introducing aerosol-jet printing as semiconductor and MEMS fabrication process
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2014
Book Article
Title
Introducing aerosol-jet printing as semiconductor and MEMS fabrication process
Author(s)
Roscher, Frank
Seifert, Tobias
Wiemer, Maik
Mainwork
Smart systems integration for micro- and nanotechnologies
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
