A novel optoelectronic instrument for on-line precise measurements

A novel highly precise distance measurement tool is introduced. Using an optical autofocussing head and a backlash free mechanical translation mechanism, it is possible to reach a resolving power of 0.1 micron and an absolute accuracy of better than 1 micron in combination with a measurement range of 40 millimeters. Due to the character of the autofocus it is also possible to recognize on-line the inclination and curvature of the surface.