1981
Conference Paper
Title

Hydrogen content and mechanical stress in glow discharge amorphous silicon

Other Title
Wasserstoffkonzentration und mechanische Spannung in amorphem Plasmasilizium
Author(s)
Paduschek, P.
Eichinger, P.
Kristen, G.
Mitlehner, H.
Mainwork
Conference
Language
English
Keyword(s)