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Microanalysis of masklessly fabricated microstructures using nuclear microprobe
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1998
Conference Paper
Title
Microanalysis of masklessly fabricated microstructures using nuclear microprobe
Author(s)
Park, Y.K.
Takai, M.
Nagai, T.
Kishimoto, T.
Seidl, A.
Lehrer, C.
Frey, L.
Ryssel, H.
Mainwork
Ion beam analysis. Proceedings of the Thirteenth International Conference on Ion Beam Analysis 1997
Conference
International Conference on Ion Beam Analysis (IBA) 1997
DOI
10.1016/S0168-583X(97)00709-X
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB