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Application of molecular dynamics to the simulation of IPVD
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2004
Conference Paper
Title
Application of molecular dynamics to the simulation of IPVD
Author(s)
Belsky, P.
Streiter, R.
Wolf, H.
Gessner, T.
Mainwork
Advanced Metallization Conference, AMC 2004
Conference
Advanced Metallization Conference (AMC) 2004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
