Table-top EUV scatterometer MARYS with high-brightness discharge plasma source

Tabletop extreme ultraviolet (EUV) scatterometer MARYS has been brought into operation in 2015. Reported here are the first results of grazing incidence EUV scattering experiments on periodic rough surfaces utilizing a high-brightness DPP source FS-5420 with pulse frequency up to 1500 Hz and EUV pulse energy up to 14 mJ into 2p steradian (13.5 nm, 2% bw). High sensitivity of EUV scatterometry allowed to record up to 15 diffraction orders at grazing reflection from a test gold coated holographic reflecting grating. From recorded scattering patterns it is possible to extract information on surface roughness and parameters of periodic structures with high precision.