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Thermal management in stacks of MATCH-X MOEMS
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2003
Conference Paper
Title
Thermal management in stacks of MATCH-X MOEMS
Author(s)
Schindler-Saefkow, F.
Wittler, O.
May, D.
Schacht, R.
Großer, V.
Michel, B.
Mainwork
International Workshop on Thermal Investigation [i.e. Investigations] of ICs and Systems, THERMINIC 2003. Collection of papers
Conference
International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) 2003
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
