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A charge compensation method for measuring passivated devices with high extraction voltage
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1991
Journal Article
Title
A charge compensation method for measuring passivated devices with high extraction voltage
Author(s)
Lackmann, R.
Weichert, G.
Journal
Microelectronic engineering
Conference
European Conference on Electron and Optical Beam Testing of Integrated Circuits 1991
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
