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Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
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1999
Conference Paper
Title
Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
Author(s)
Bauer, A.J.
Mayer, P.
Frey, L.
Häublein, V.
Ryssel, H.
Mainwork
Ion implantation technology 98. International Conference on Ion Implantation Technology. Proceedings. Vol.1
Conference
International Conference on Ion Implantation Technology (IIT) 1998
Language
English
IIS-B
