Options
2013
Conference Paper
Title
Wafer transport via conveyor belts - influencing parameters and resulting impact
Abstract
Despite being seen as a non-value adding process, gentle handling of thin and ultra-thin (~50µm) substrates is one key factor for efficient production as it directly effects some of the key performance indicators on factory level, such as throughput and mechanical yield. For not being a bottleneck, conveyor belt systems should transport single substrates within cycle times of less than one second. Several impacting parameters influence the performance. One major issue can be seen in the aging of the belts and the resulting decrease of sticking friction. For not jeopardizing the positioning accuracy, dynamic parameter settings of the motors have to be adapted over the lifetime. Based on the results gathered by running several test batches, it is now possible to run the system over the whole life time at optimal point of operation while meeting all boundary conditions resolving from time, cost and quality aspects.