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Investigation of residual stresses in microsystems using X-ray diffraction
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2000
Journal Article
Title
Investigation of residual stresses in microsystems using X-ray diffraction
Author(s)
Kämpfe, B.
Journal
Materials Science and Engineering, A. Structural materials, properties, microstructure and processing
DOI
10.1016/S0921-5093(00)00869-8
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
