A 0.5-50 GHz on-wafer, intermodulation, load-pull and power measurement system

A novel on-wafer, intermodulation, loadpull and power measurement system for characterizing devices and circuits for frequencies up to 50 GHz has been developed. The two-tone intermodulation measurement capabilities were added to an existing power and harmonic load-pull measurement system using the 50 GHz spectrum analyzer HP8565. Fundamental power levels and all measured intermodulation (IM) products are vector corrected to the probe tips of the DUT. A key feature of the described system are the vector corrected IM measurements and the capability to study the effects of load impedance on intermodulation.