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Hochleistungsimpulsmagnetronsputtern - HIPIMS
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2013
Conference Paper
Title
Hochleistungsimpulsmagnetronsputtern - HIPIMS
Author(s)
Bandorf, R.
Mainwork
OTTI-Seminar Kathodenzerstäubung - Sputtering
Conference
Seminar "Kathodenzerstäubung - Sputtering" 2013
Language
German
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST