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Fatique of materials used in microelectromechanical systems (MEMS)
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2002
Conference Paper
Title
Fatique of materials used in microelectromechanical systems (MEMS)
Author(s)
Sharpe, W.N.
Bagdahn, J.
Fraunhofer-Institut für Werkstoffmechanik IWM
Mainwork
Fatigue 2002. Proceedings of the Eighth International Fatigue Congress
Conference
International Fatigue Congress 2002
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
