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Ion projection lithography for nano-patterning
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2000
Conference Paper
Title
Ion projection lithography for nano-patterning
Author(s)
Heuberger, A.
Brünger, W.
Mainwork
Materials issues and modeling for device nanofabrication
Conference
Symposium J: "Advanced Materials and Techniques for Nanolithography" 1999
Symposium N: "Atomic Scale Measurements and Atomistic Models of Epitaxial Growth and Lithography" 1999
Materials Research Society (Fall Meeting) 1999
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
