Fused silica GRISMs manufactured by hydrophilic direct bonding at moderate heating

For high-resolution spectroscopy in space, GRISM elements-obtained by patterning gratings onto a prism surface-find increasing applications. We report on GRISM manufacturing by joining the individual functional elements-prisms and gratings-to suitable components by the technology of hydrophilic direct bonding. Fused silica was used as a substrate material and binary gratings were fabricated by standard e-beam lithography and dry etching. Alignment of the grating dispersion direction to the prism angle was realized by passive adjustment on dedicated bonding gear matched to the substrate geometry. Materials adapted bonds of high transmission, stiffness, and strength were obtained after heat treatment at temperatures of about 200 °C in vacuum. Examples for bonding uncoated as well as coated grating surfaces are given. The results illustrate the great potential of hydrophilic glass direct bonding for manufacturing transmission optics to be used in space or other heavy duty applications.