1999
Journal Article
Title

A study of the interface states in MIS-structures with thin SiO2 and SiOxNy layers using deep level transient spectroscopy

Author(s)
Beyer, R.
Burghardt, H.
Thomas, E.
Reich, R.
Zahn, D.R.T.
Gessner, T.
Journal
DOI
Language
English