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Semi-additive and fully additive copper deposition on ORMOCER(R) - A comparison
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2000
Conference Paper
Title
Semi-additive and fully additive copper deposition on ORMOCER(R) - A comparison
Author(s)
Stolle, T.
Valizadeh, S.
Lambert, D.
Mainwork
MicroMat 2000. Proceedings 3rd International Conference and Exhibition Micro Materials
Conference
Micro Materials (Micro Mat) 2000
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM