Translatory MEMS actuator with extraordinary large stroke for optical path length modulation

A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers - is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.