2014
Conference Paper
Title

ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics

Author(s)
Wächtler, T.
Sharma, A.
Ahner, N.
Melzer, Marcel
Mueller, S.
Lehmann, D.
Schäfer, P.
Schulze, S.
Schulz, Stefan E.  
Zahn, Dietrich R.T.  
Hietschold, M.
Geßner, Thomas  
Mainwork
Conference
Language
English