Investigation of thin oxide films on titanium for capacitor applications

Thin passive films on titanium formed by electrolytic oxidation show a high relative permittivity and could be a promising cost effective dielectric material for capacitor applications. In the present work, the films were formed in an acetate buffer solution by potentiodynamic polarisation up to various potentials. The film thickness was determined by coulometry and ellipsometry. The growth factor is 2.7 nm/V. Furthermore, by using an electrochemical micro-capillary cell the anodising process was performed at high lateral resolution on different substrate grains with various crystallographic orientations. An influence of the Ti grain orientation on the TiO2 film thickness could not be observed under the used experimental conditions. By means of transmission electron microscope(TEM) investigation the oxide film structure could be determined as prevailing amorphous. Entnommen aus <a_href="http://www.fiz-technik.de/db/b_tema.htm" target="_blank">TEMA</a>