Atomic force microscopy probes with integrated boron doped diamond electrodes: Fabrication and application

We report on the fabrication and characterization of atomic force microscopy (AFM) probes with integrated boron-doped diamond (BDD) electrodes. Silicon AFM probes were overgrown with boron-doped diamond and hydrogen-terminated during the plasma enhanced chemical vapor deposition (PECVD) process. As surface termination plays a significant role in the electrochemical behavior of BDD-electrodes, electrochemical surface treatment after FIB milling was performed to recover the surface properties of boron-doped diamond. Simulation of diffusion profiles towards the integrated electrode, as well as simultaneous topography and current imaging with the AFM tip-integrated boron-doped diamond electrode are demonstrated.