Twyman-Green-type integrated laser interferometer array for parallel MEMS testing

In this paper the concept, design and realization of an integrated laser interferometer are presented. The integrated Twyman-Green-type interferometer is based on micro-optical diffraction gratings in the resonance domain. The fabrication process of these gratings and their assembly in the functional interferometer will be discussed in detail. The interferometer, available in array configuration of 5 × 5 channels, is part of a test set-up for a fast characterization of M(O)EMS devices at a wafer level. The first results of the interferometric measurements on an MEMS object are presented.