Large area MSM photodiode array for 0.85µm wavelength 10 Gbit/s per channel parallel optical links

At 1 x 12 metal-semiconductor-metal (MSM) photodiode array operating at 10 Gbit/s per channel was developed for short-haul 0.85 µm wavelength parallel optical links. The GaAs-based MSM photodiodes with a diameter of 80 µm have a responsivity of 0.30 A/W a 3 V, a dark current of less than 1 nA at 3 V, a capacitance of 0.20 pF at 1 MHz, and a - 3 dB bandwidth of 10 GHz at (2.5 V, 50 Ohm).