Ultrabarriereschichten

In order to predict the behaviour of thin barrier layers, the equations governing diffusion must be known. From these, models based on the composition of such layers or their build-up can be developed. Using low pressure RF plasmas, even pressure- and temperature-sensitive substrates can be coated. Such coatings range in thickness from a few nanometres to a few microns The precursors used were hexamethyldisiloxane, oxygen and nitrogen. The coatings themselves can be tailored in terms of their transparency, flexibility, stability, adhesion and diffusion properties.