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  4. Laser-induced forward transfer of aluminium particles in different gaseous environment
 
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2018
Conference Paper
Titel

Laser-induced forward transfer of aluminium particles in different gaseous environment

Abstract
Laser-induced forward transfer is a novel technique used for Aluminium implementing on wafer substrates in different gaseous environments: vacuum, room atmosphere, Argon and Arcal (F5). The laser pulse energy is optimized during the process.
Author(s)
Azhdast, M.H.
Eichler, H.J.
Lang, K.-D.
Glaw, V.
Kossatz, M.
Hauptwerk
Compact EUV & X-ray Light Sources
Konferenz
Conference "Compact EUV & X-ray Light Sources" (EUVXRAY) 2018
Conference "High-Brightness Sources and Light-Driven Interactions" 2018
Thumbnail Image
DOI
10.1364/EUVXRAY.2018.JT5A.21
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
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