English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Microstructuring of molecularly thin polymer layers by photolithography
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1998
Journal Article
Title
Microstructuring of molecularly thin polymer layers by photolithography
Author(s)
Prucker, O.
Schimmel, M.
Tovar, G.
Knoll, W.
Rühe, J.
Journal
Advanced Materials
DOI
10.1002/(SICI)1521-4095(199810)10:14<1073::AID-ADMA1073>3.3.CO;2-4
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
