• English
  • Deutsch
  • Log In
    Password Login
    or
  • Research Outputs
  • Projects
  • Researchers
  • Institutes
  • Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Abschlussarbeit
  4. Characterization of low temperature plasma generated oxides on germanium based substrates
 
  • Details
  • Full
Options
2016
Master Thesis
Titel

Characterization of low temperature plasma generated oxides on germanium based substrates

ThesisNote
Dresden, TU, Master Thesis, 2016
Author(s)
Poduval, Geedhika Kallidil
Advisor
Czernohorsky, Malte
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Lakner, Hubert
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Fischer, Wolf-Joachim
Technische Universität <Dresden, Germany>
Verlagsort
Dresden
Thumbnail Image
Language
English
google-scholar
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Send Feedback
© 2022