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Characterization of low temperature plasma generated oxides on germanium based substrates
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2016
Master Thesis
Titel
Characterization of low temperature plasma generated oxides on germanium based substrates
ThesisNote
Dresden, TU, Master Thesis, 2016
Author(s)
Poduval, Geedhika Kallidil
Advisor
Czernohorsky, Malte
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Lakner, Hubert
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Fischer, Wolf-Joachim
Technische Universität <Dresden, Germany>
Verlagsort
Dresden
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS
