2016
Master Thesis
Title

Characterization of low temperature plasma generated oxides on germanium based substrates

Thesis Note
Dresden, TU, Master Thesis, 2016
Author(s)
Poduval, Geedhika Kallidil
Advisor(s)
Czernohorsky, Malte  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Lakner, Hubert  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Fischer, Wolf-Joachim
Technische Universität <Dresden, Germany>
Publishing Place
Dresden
Language
English