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Characterization of low temperature plasma generated oxides on germanium based substrates
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2016
Master Thesis
Title
Characterization of low temperature plasma generated oxides on germanium based substrates
Thesis Note
Dresden, TU, Master Thesis, 2016
Author(s)
Poduval, Geedhika Kallidil
Advisor(s)
Czernohorsky, Malte
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Lakner, Hubert
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Fischer, Wolf-Joachim
Technische Universität <Dresden, Germany>
Publishing Place
Dresden
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS