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Technical note: Optical properties of reactively evaporated SiOx films
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1987
Conference Paper
Titel
Technical note: Optical properties of reactively evaporated SiOx films
Author(s)
Schiller, S.
Beister, G.
Hauptwerk
Metallurgical coatings 1987. Vol.4
Konferenz
International Conference on Metallurgical Coatings 1987
DOI
10.1016/0257-8972(87)90202-7
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
