2006
Poster
Titel

Accurate parameter extraction for the simulation of direct structuring by ion beams
Titel Supplements
Poster at MNE 2006, 32nd International Conference on Micro- and Nano- Engineering 2006, Barcelona, Spain
Author(s)
Beuer, S.
Rommel, M.
Lehrer, C.
Platzgummer, E.
Kvasnica, S.
Bauer, A.J.
Ryssel, H.
Konferenz
DOI
File(s)
Language
English
Tags