Novel precision and micro grinding tools made by chemical vapour deposition of diamond
High precision grinding tools can be manufactured using microcrystalline CVD diamond as grinding layer. The small and sharp edges of the crystallites act as cutting edges and - deposited onto tool base bodies - can perform grinding and honing processes. Peripheral and face grinding wheels as well as abrasive pencils have been manufactured using silicon, ceramics, graphite and cemented carbide as base body materials. High performance was achieved in the grinding of glass, ceramics, silicon, cemented carbide and hartened steel. Tool life was limited only due to wear of the tips of the diamond crystallites and not due to layer flacking. Workpiece roughnesses Ra of 5 nm were obtained.