2007
Poster
Titel

Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy
Titel Supplements
Poster at ICN+T 2007, International Conference on Nano Science and Technology 2007, Stockholm, Sweden
Author(s)
Beuer, S.
Yanev, V.
Rommel, M.
Bauer, A.J.
Ryssel, H.
Konferenz
DOI
File(s)
Language
English
Tags