1989
Conference Paper
Title

Assessment of semi-insulating InP:Fe layers for substrate applications

Abstract
Semi-insulating InP epi-substrates formed by epitaxial InP:Fe layers on suitable base substrates are proposed and investigated. Compared to standard commercial s.i. bulk substrates, such epi-substrates offer lower defect densities, well-controllable Fe-levels and considerably higher specific resistivities.
Author(s)
Grote, N.
Bach, H.G.
Feifel, T.
Franke, D.
Harde, P.
Sartorious, B.
Wolfram, P.
Mainwork
Conference
Language
English
Keyword(s)