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1989
Conference Paper
Titel
Assessment of semi-insulating InP:Fe layers for substrate applications
Abstract
Semi-insulating InP epi-substrates formed by epitaxial InP:Fe layers on suitable base substrates are proposed and investigated. Compared to standard commercial s.i. bulk substrates, such epi-substrates offer lower defect densities, well-controllable Fe-levels and considerably higher specific resistivities.

Language
English