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Large-area PLD of thin films by target shaping
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1996
Conference Paper
Titel
Large-area PLD of thin films by target shaping
Author(s)
Dietsch, R.
Mai, H.
Hauptwerk
Symposium Large Area Deposition of Thin Films 1996. Invited Lecture
Konferenz
Symposium Large Area Deposition of Thin Films 1996
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS
