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1989
Journal Article
Title

Excimerlaser für die Mikrobearbeitung

Other Title
Excimerlaser for microprocessing
Abstract
Excimer lasers for special microfinishing. Excimer lasers with their UV radiation are just beginning to be industrially exploited. They achieve high levels of performance when called upon to modify a surface finish and to bore tiny holes in metal, plastics and glass. The data and examples provided here permit to assess their practical application.
Author(s)
Schulze, W.
Wehner, M.
Herziger, G.
Poprawe, R.
Journal
F und M. Feinwerktechnik und Meßtechnik  
Language
German
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)
  • Edelgas-Halogenid-Laser

  • excimer laser

  • microprocessing

  • Mikrobearbeitung

  • noble-gas-halid-laser

  • pulse power

  • Pulsleistung

  • Quantenenergie

  • quantum energy

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