Application of indentation testing devices for determination of elastic properties of micromechanical components
Einsatz von Eindruckprüfgeräten zur Bestimmung elastischer Eigenschaften von Mikrokomponenten
Because of their ability to load very small parts and because of the accuracy in load and displacement determination recent indentation testing devices may also be applied to study elastic properties of micromechanical components in bending experiments. For example, the stiffness of movable parts of different acceleration sensors could be determined by microbending experiments very readily. However, to derive elastic material properties (as Young's modulus) from these investigations requires careful assessment of the measured data. This can be achieved by comparing the experimental results to Finite Element Method (FEM) simulations of bend testing. Micro-bending results on a small silicon cantilever are presented.