English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
High-rate vapor deposition and large systems for coating processes
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1987
Journal Article
Title
High-rate vapor deposition and large systems for coating processes
Author(s)
Schiller, S.
Beister, G.
Heisig, U.
Förster, H.
Journal
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.574964
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
