English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
High-rate vapor deposition and large systems for coating processes
Details
Full
Export
Statistics
Options
1987
Journal Article
Titel
High-rate vapor deposition and large systems for coating processes
Author(s)
Schiller, S.
Beister, G.
Heisig, U.
Förster, H.
Zeitschrift
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.574964
Language
English
google-scholar
View Details
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
