New materials and technologies for micromachined metal oxide gas sensor arrays

We present a new silicon micromachined low power heater platform comprising sensor arrays which feature a number of different gas sensitive metal oxides. The sensing elements of the arrays are composed of alternatively n-type SnO/sub 2/, n-type WO/sub 3/, n-type ZnO, p-type Cr/sub 1.8/Ti/sub 0.2/O/sub 3+z/ or n-type V/sub 2/O/sub 5/. Characterisation of the arrays under trace gas exposure is presented.